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19-3247; Rev 1; 2/05
Dual Per-Pin Parametric Measurement Units
General Description
The MAX9951/MAX9952 dual parametric measurement units (PMUs) feature a small package size, wide force and measurement range, and high accuracy, making the devices ideal for automatic test equipment (ATE) and other instrumentation that requires a PMU per pin or per site. The MAX9951/MAX9952 force or measure voltages in the -2V to +7V through -7V to +13V ranges, dependent upon the supply voltage (VCC and VEE). The devices handle supply voltages of up to +30V (VCC to VEE) and a 20V device-under-test (DUT) voltage swing at full current. The MAX9951/MAX9952 also force or measure currents up to 64mA with a lowest full-scale range of 2A. Integrated support circuitry facilitates use of an external buffer amplifier for current ranges greater than 64mA. A voltage proportional to the measured output voltage or current is provided at the MSR_ output. Integrated comparators, with externally set voltage thresholds, provide detection for both voltage and current levels. The MSR_ and comparator outputs can be placed in a high-impedance state. Separate FORCE and SENSE connections are short-circuit protected for voltages from (VEE - 0.3V) to (VCC + 0.3V). The FORCE output also features a low-leakage, high-impedance state. Integrated voltage clamps limit the force output to levels set externally. The force-current or the measure-current voltage can be offset -0.2V to +4.4V (IOS). This feature allows for the centering of the control or measured signal within the external DAC or ADC range. The MAX9951D/MAX9952D feature an integrated 10k force-sense resistor between FORCE_ and SENSE_. The MAX9951F/MAX9952F have no internal force-sense resistor. These devices are available in a 64-pin, 10mm x 10mm, 0.5mm pitch TQFP package with an exposed 8mm x 8mm die pad on the top (MAX9951) or the bottom (MAX9952) of the package for efficient heat removal. The exposed pad is internally connected to VEE. The MAX9951/MAX9952 are specified over the commercial 0C to +70C temperature range.
Features
Force Voltage/Measure Current (FVMI) Force Current/Measure Voltage (FIMV) Force Voltage/Measure Voltage (FVMV) Force Current/Measure Current (FIMI) Force Nothing/Measure Voltage (FNMV) Force Nothing/Measure Current (FNMI, Range E Only) Termination/Measure Current Termination/Measure Voltage Five Programmable Current Ranges 2A 20A 200A 2mA 64mA -2V to +7V Through -7V to +13V Input-Voltage Range Force-Current/Measure-Current AdjustableVoltage Offset (IOS) Programmable Voltage Clamps at Force Output Low-Leakage, High-Impedance Measure, and Force States 3-Wire Serial Interface Low 6mA (max) Quiescent Current per PMU
MAX9951/MAX9952

Ordering Information
PART MAX9951DCCB MAX9951FCCB* MAX9952DCCB MAX9952FCCB* TEMP RANGE 0C to +70C 0C to +70C 0C to +70C 0C to +70C PIN-PACKAGE 64 TQFP-EPR 64 TQFP-EPR 64 TQFP-EP 64 TQFP-EP
*Future product--contact factory for availability.
Applications
Memory Testers VLSI Testers System-on-a-Chip Testers Structural Testers
PART MAX9951DCCB MAX9951FCCB MAX9952DCCB MAX9952FCCB
Selector Guide
DESCRIPTION Internal 10k force-sense resistor External force-sense resistor Internal 10k force-sense resistor External force-sense resistor
Pin Configurations appear at end of data sheet. ________________________________________________________________ Maxim Integrated Products 1
For pricing, delivery, and ordering information, please contact Maxim/Dallas Direct! at 1-888-629-4642, or visit Maxim's website at www.maxim-ic.com.
Dual Per-Pin Parametric Measurement Units MAX9951/MAX9952
ABSOLUTE MAXIMUM RATINGS
VCC to AGND .......................................................................+20V VEE to AGND.........................................................................-15V VCC to VEE ...........................................................................+32V VL to AGND............................................................................+6V AGND to DGND.....................................................-0.5V to +0.5V Digital Inputs/Outputs ..................................-0.3V to (VL + 0.3V) All Other Pins to AGND ....................(VEE - 0.3V) to (VCC + 0.3V) Continuous Power Dissipation (TA = +70C) MAX9951_CCB (derate 43.5mW/C above +70C) .....3478mW MAX9952_CCB (derate 125mW/C above +70C) ...10,000mW JA MAX9951_CCB .........................................................+8C/W JC MAX9951_CCB .........................................................+2C/W JA MAX9952_CCB .......................................................+23C/W JC MAX9952_CCB .........................................................+8C/W Junction Temperature ......................................................+150C Storage Temperature Range .............................-65C to +150C Operating Temperature Range (commercial) ........0C to +70C Lead Temperature (soldering 10s) ..................................+300C
Stresses beyond those listed under "Absolute Maximum Ratings" may cause permanent damage to the device. These are stress ratings only, and functional operation of the device at these or any other conditions beyond those indicated in the operational sections of the specifications is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability.
DC ELECTRICAL CHARACTERISTICS
(VCC = +12V, VEE = -7V, VL = +3.3V, TA = +25C, unless otherwise noted. Specifications at TA = TMIN and TA = TMAX are guaranteed by design and characterization. Typical values are at TA = +25C, unless otherwise noted.) (Note 1)
PARAMETER FORCE VOLTAGE Force Input Voltage Range Forced Voltage Input Bias Current Forced-Voltage Offset Forced-Voltage-Offset Temperature Coefficient Forced-Voltage Gain Error Forced-Voltage-Gain Temperature Coefficient Forced-Voltage Linearity Error MEASURE CURRENT Measure-Current Offset Measure-Current-Offset Temperature Coefficient Measure-Current Gain Error Measure-Current-Gain Temperature Coefficient Linearity Error IMLER Gain and offset errors calibrated out (Notes 2, 3, 5) -0.02 IMGE (Note 4) -1 20 +0.02 IMOS (Note 2) -1 20 +1 +1 %FSR ppm/C % ppm/C %FSR VFLER Gain and offset errors calibrated out (Notes 2, 3) -0.02 VFGE Nominal gain of +1 -1 VFOS -25 100 0.005 10 +0.02 +1 VIN0_, VIN1_ VDUT DUT current at full scale DUT current = 0 VCC = +12V, VEE = -7V VCC = +18V, VEE = -12V VEE + 2.5 -2 -7 VEE + 2.5 1 +25 VCC - 2.5 +7 +13 VCC - 2.5 A mV V/C % ppm/C %FSR V V SYMBOL CONDITIONS MIN TYP MAX UNITS
2
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Dual Per-Pin Parametric Measurement Units
DC ELECTRICAL CHARACTERISTICS (continued)
(VCC = +12V, VEE = -7V, VL = +3.3V, TA = +25C, unless otherwise noted. Specifications at TA = TMIN and TA = TMAX are guaranteed by design and characterization. Typical values are at TA = +25C, unless otherwise noted.) (Note 1)
PARAMETER Measure-Output-Voltage Range Over Full-Current Range Current-Sense Amp Offset-Voltage Input Rejection of OutputMeasure Error Due to Common-Mode Sense Voltage SYMBOL VIOS_ = VDUTGND VMSR VIOS_ = 4V + VDUTGND VIOS Relative to VDUTGND 0 -0.2 +8 +4.4 V CONDITIONS MIN -4 TYP MAX +4 V UNITS
MAX9951/MAX9952
CMVRLER (Notes 4 and 6)
+0.001
+0.007
%FSR/V
Range E, R_E = 500k Range D, R_D = 50k Measure-Current Range Range C, R_C = 5k Range B, R_B = 500 Range A, R_A = 15.6 FORCE CURRENT Input Voltage Range for Setting Forced Current Over Full Range Current-Sense Amp Offset-Voltage Input IOS_ Input Bias Current Forced-Current Offset Forced-Current-Offset Temperature Coefficient Forced-Current Gain Error Forced-Current-Gain Temperature Coefficient Forced-Current Linearity Error Rejection of Output Error Due to Common-Mode Load Voltage IFLER Gain and offset errors calibrated out (Notes 2, 3, 5) (Note 4) (Note 2) VIN0_, VIN1_ VIOS VIOS_ = VDUTGND VIOS_ = 4V + VDUTGND Relative to VDUTGND
-2 -20 -200 -2 -64
+2 +20 +200 +2 +64 mA A
-4 0 -0.2 1 -1 20 -1 20 -0.02
+4 V +8 +4.4 V A +1 %FSR ppm/C +1 % ppm/C +0.02 %FSR
CMRIOER (Notes 4 and 6) Range E, R_E = 500k Range D, R_D = 50k -2 -20 -200 -2 -64
+0.001
+0.007 +2 +20 +200 +2 +64
%FSR/V
A
Forced-Current Range
Range C, R_C = 5k Range B, R_B = 500 Range A, R_A = 15.6
mA
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3
Dual Per-Pin Parametric Measurement Units MAX9951/MAX9952
DC ELECTRICAL CHARACTERISTICS (continued)
(VCC = +12V, VEE = -7V, VL = +3.3V, TA = +25C, unless otherwise noted. Specifications at TA = TMIN and TA = TMAX are guaranteed by design and characterization. Typical values are at TA = +25C, unless otherwise noted.) (Note 1)
PARAMETER MEASURE VOLTAGE Measure-Voltage-Offset Measure-Voltage-Offset Temperature Coefficient Gain Error Measure-Voltage-Gain Temperature Coefficient Measure-Voltage Linearity Error Measure-Output-Voltage Range Over Full DUT Voltage FORCE OUTPUT Off-State Leakage Current Short-Circuit Current Limit Force-to-Sense Resistor SENSE INPUT Input Voltage Range Leakage Current COMPARATOR INPUTS Input Voltage Range Offset Voltage Input Bias Current VOLTAGE CLAMPS Input Control Voltage Clamp Voltage Accuracy DIGITAL INPUTS Input High Voltage (Note 8) Input Low Voltage (Note 8) Input Current Input Capacitance VL = 5V VIH VL = 3.3V VL = 2.5V VIL IIN CIN VL = 5V or 3.3V VL = 2.5V 1 3.0 +3.5 +2.0 +1.7 +0.8 +0.7 V A pF V VCLLO_, VCLHI_ (Note 7) VEE + 2.4 -100 VCC - 2.4 +100 V mV VEE + 2.5 -25 1 VCC - 2.5 +25 V mV A F option only VEE + 2.5 -1 VCC - 2.5 +1 V nA ILIMILIM+ RFS D option only -1 -92 +65 8 10 +1 -65 +92 12 nA mA k VMLER Gain and offset errors calibrated out (Notes 2, 3, 5) DUT current at full scale DUT current = 0 VCC = +12V, VEE = -7V VCC = +18V, VEE = -12V -0.02 -2 -7 VEE + 2.5 VMGER Nominal gain of +1 -1 VMOS -25 100 0.005 10 +0.02 +7 +13 VCC - 2.5 V +1 +25 mV V/C % ppm/C %FSR SYMBOL CONDITIONS MIN TYP MAX UNITS
VMSR
4
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Dual Per-Pin Parametric Measurement Units
DC ELECTRICAL CHARACTERISTICS (continued)
(VCC = +12V, VEE = -7V, VL = +3.3V, TA = +25C, unless otherwise noted. Specifications at TA = TMIN and TA = TMAX are guaranteed by design and characterization. Typical values are at TA = +25C, unless otherwise noted.) (Note 1)
PARAMETER Output High Voltage Output Low Voltage High-Impedance-State Leakage Current High-Impedance-State Output Capacitance DIGITAL OUTPUTS Output High Voltage Output Low Voltage POWER SUPPLY Positive Supply Negative Supply Total Supply Voltage Logic Supply Positive Supply Current Negative Supply Current Logic Supply Current Analog Ground Current Digital Ground Current Power-Supply Rejection Ratio VCC VEE VL ICC IEE IL IAGND IDGND PSRR No load, clamps enabled No load, clamps enabled No load, all digital inputs at rails No load, clamps enabled No load, all digital inputs at rails 1MHz, measured at force output 60Hz, measured at force output 0.9 1.4 20 85 (Note 1) (Note 1) +10 -15 +2.375 +12 -7 +18 -5 +30 +5.5 10.0 10.0 1.2 V V V V mA mA mA mA mA dB VOH VOL IOUT = 1mA, VL = +2.375V to +5.5V, relative to DGND IOUT = -1mA, VL = +2.375V to +5.5V, relative to DGND VL - 0.25 +0.2 V V SYMBOL VOH VOL CONDITIONS VL = +2.375V to +5.5V, RPUP = 1k VL = +2.375V to +5.5V, RPUP = 1k 1 6.0 MIN VL - 0.2 +0.4 TYP MAX UNITS V V A pF COMPARATOR OUTPUTS
MAX9951/MAX9952
VCC - VEE (Note 9)
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Dual Per-Pin Parametric Measurement Units MAX9951/MAX9952
AC ELECTRICAL CHARACTERISTICS
(VCC = +12V, VEE = -7V, VL = +3.3V, CCM = 120pF, CL = 100pF, TA = +25C, unless otherwise noted. Specifications at TA = TMIN and TA = TMAX are guaranteed by design and characterization. Typical values are at TA = +25C, unless otherwise noted.) (Note 1)
PARAMETER SYMBOL CONDITIONS Range E, R_E = 500k Range D, R_D = 50k Settling Time Range C, R_C = 5k Range B, R_B = 500 Range A, R_A = 15.6 FORCE VOLTAGE/MEASURE CURRENT (Notes 10, 11) Range E, R_E = 500k Range D, R_D = 50k Settling Time Range C, R_C = 5k Range B, R_B = 500 Range A, R_A = 15.6 Range Change Switching In addition to force-voltage and measure-current settling times, range A to range B, R_A = 15.6, R_B = 500 500 100 30 25 25 12 s 55 s MIN TYP 150 50 20 20 25 30 s MAX UNITS FORCE VOLTAGE (Notes 10, 11)
FORCE CURRENT/MEASURE VOLTAGE (Notes 10, 11) Range E, R_E = 500k Range D, R_D = 50k Settling Time Range C, R_C = 5k Range B, R_B = 500 Range A, R_A = 15.6 Range Change Switching In addition to force-current and measure-voltage settling times, range A to range B, R_A = 15.6, R_B = 500 2500 350 30 25 25 12 s 60 s
SENSE INPUT TO MEASURE OUTPUT PATH Propagation Delay MEASURE OUTPUT Maximum Stable Load Capacitance COMPARATORS (CLCOMP = 20pF, RPUP = 1k) Propagation Delay Rise Time Fall Time Serial Clock Frequency SCLK Pulse-Width High SCLK Pulse-Width Low fSCLK tCH tCL 50mV overdrive, 1VP-P, measured from inputthreshold zero crossing to 50% of output voltage (Note 12) 20% to 80% 80% to 20% (Note 13) 12 12 75 60 5 20 ns ns ns MHz ns ns 1000 pF CLMSR = 100pF 0.2 s
SERIAL PORT (VL = +3.3V, CDOUT = 10pF)
6
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Dual Per-Pin Parametric Measurement Units
AC ELECTRICAL CHARACTERISTICS (continued)
(VCC = +12V, VEE = -7V, VL = +3.3V, CCM = 120pF, CL = 100pF, TA = +25C, unless otherwise noted. Specifications at TA = TMIN and TA = TMAX are guaranteed by design and characterization. Typical values are at TA = +25C, unless otherwise noted.) (Note 1)
PARAMETER SCLK Fall to DOUT Valid CS Low to SCLK High Setup SCLK High to CS High Hold SCLK High to CS Low Hold CS High to SCLK High Setup DIN to SCLK High Setup DIN to SCLK High Hold CS Pulse-Width High CS Pulse-Width Low LOAD Pulse-Width Low VDD High to CS Low (Power-Up) SYMBOL tDO tCSS0 tCSH1 tCSH0 tCSS1 tDS tDH tCSWH tCSWL tLDW (Note 12) (Note 12) 10 22 0 5 10 0 10 10 20 500 CONDITIONS MIN TYP MAX 22 UNITS ns ns ns ns ns ns ns ns ns ns ns
MAX9951/MAX9952
Note 1: The device operates properly with different supply voltages with equally different voltage swings. Note 2: Interpret errors expressed in terms of %FSR (percent of full-scale range) as a percentage of the end-point-to-end-point range, i.e., for the 64mA range, the full-scale range = 128mA, and a 1% error = 1.28mA. Note 3: Case must be maintained 5C for linearity specifications. Note 4: Tested in range C. Note 5: Current linearity specifications are maintained to within 700mV of the clamp voltages when the clamps are enabled. Note 6: Specified as the percent of full-scale range change at the output per volt change in the DUT voltage. Note 7: VCLLO_ and VCLHI_ should differ by at least 700mV. Note 8: The digital interface accepts +5V, +3.3V, and +2.5V CMOS logic levels. The voltage at VL adjusts the threshold. Note 9: Guaranteed by design. Note 10: Settling times are to 0.1% of FSR. Cx_ = 60pF. Note 11: All settling times are specified using a single compensation capacitor (Cx_) across all current-sense resistors. Use an individual capacitor across each sense resistor for better performance across all current ranges, particularly the lower ranges. Note 12: The propagation delay time is only guaranteed over the force-voltage output range. Propagation delay is measured by holding VSENSE_ steady and transitioning THMAX_ or THMIN_. Note 13: Maximum serial clock frequency may diminish at VL < +3.3V.
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7
Dual Per-Pin Parametric Measurement Units MAX9951/MAX9952
Typical Operating Characteristics
(VCC = +12V, VEE = -7V, CL = 100pF, CCM_ = 120pF, CCX_ = 60pF, RL to +2.5V, range A: R_A = 15.6, RL = 70.3; range B: R_B = 500, RL = 2.25k; range C: R_C = 5k, RL = 22.5k; range D: R_D = 50k, RL = 225k; range E: R_E = 500k, RL = 2.25M, TA = +25C.)
TRANSIENT RESPONSE FVMI MODE, RANGES A, B, C
MAX9551 toc01
TRANSIENT RESPONSE FVMI MODE, RANGE D
MAX9551 toc02
TRANSIENT RESPONSE FVMI MODE, RANGE E
MAX9551 toc03
IN_ 5V/div 0
IN_ 5V/div 0
IN_ 5V/div 0
FORCE_ 5V/div 0
FORCE_ 5V/div 0
FORCE_ 5V/div 0
20s/div
100s/div
1ms/div
TRANSIENT RESPONSE FVMV MODE, RANGE C
MAX9551 toc04
TRANSIENT RESPONSE FIMI MODE, RANGES A, B, C
MAX9551 toc05
TRANSIENT RESPONSE FIMI MODE, RANGE D
MAX9551 toc06
IN_ 5V/div 0
IN_ 5V/div 0
IN_ 5V/div 0
FORCE_ 5V/div 0
FORCE_ 5V/div 0
FORCE_ 5V/div 0
20s/div
20s/div
100s/div
TRANSIENT RESPONSE FIMI MODE, RANGE E
MAX9551 toc07
TRANSIENT RESPONSE FIMI MODE, RANGE C
MAX9551 toc08
IOS vs. POWER SUPPLIES
20 15 VOLTAGE (V) 10 5 0 -5 -10 -15 3.2 4.4 IOS (MAX) IOS (MIN) -0.2 VEE -7 1.8 VCC 11.2
MAX9951 toc09
IN_ 5V/div 0
IN_ 5V/div 0
FORCE_ 5V/div 0
FORCE_ 5V/div 0
2ms/div
40s/div
8
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Dual Per-Pin Parametric Measurement Units
Pin Description
PIN MAX9951 MAX9952 1 2 3 5, 15, 34, 44 4, 14, 35, 45 6 7 8 9 10 11 12 13 16 17 18 19 20 21 22 23 24 25 26 48 47 46 5, 15, 34, 44 4, 14, 35, 45 43 42 41 40 39 38 37 36 33 32 31 30 29 28 27 26 25 24 23 NAME SENSEA FORCEA CCA VEE VCC CCOMA RAAS RAA RAB RAC RAD RAE RAX EXTSELA DUTLA DUTHA HI-ZA INSELA TEMP DGND VL DOUT DIN LOAD FUNCTION PMU-A Sense Input. A Kelvin connection to the DUT. Provides the feedback signal in FVMI mode and the measured signal in FIMV mode for PMU-A. PMU-A Driver Output. Forces a current or voltage to the DUT for PMU-A. PMU-A Compensation Capacitor Connection. Provides compensation for the PMU-A main amplifier. Connect a 120pF capacitor from CCA to CCOMA. Negative Analog-Supply Input Positive Analog-Supply Input Common Connection of CMA and CXA for PMU-A PMU-A Range Setting Resistor-Sense Connection PMU-A Range A Setting Resistor Connection PMU-A Range B Setting Resistor Connection PMU-A Range C Setting Resistor Connection PMU-A Range D Setting Resistor Connection PMU-A Range E Setting Resistor Connection PMU-A Current-Range Sense-Resistor Connection. Connects to the external current range sense resistor for PMU-A. PMU-A External Current-Range Selector. Selects the external current range for PMU-A. PMU-A Window Comparator Lower Comparator Output. A high output indicates that the sensed voltage at the window comparator is above VTHMINA. DUTLA is an open-drain output. PMU-A Window Comparator Higher Comparator Output. A high output indicates that the sensed voltage at the window comparator is below VTHMAXA. DUTHA is an open-drain output. MSRA Tri-State Control Input. A logic-low places MSRA in a high-impedance state. Input Select PMU-A. INSELA is a logic input that selects between IN0A and IN1A. Force INSELA low to select IN0A. INSELA is NANDed with control register bit INMODEA. Temperature Output. VTEMP = 10mV/C. TDIE(C) = (100)VTEMP - 273. Digital Ground Logic-Supply Voltage Input. The voltage applied at VL sets the upper logic-voltage level. Serial-Data Output. A standard SPITM-compatible output. Data appears at DOUT MSB first. Serial-Data Input. Load data into DIN MSB first. Serial-Port Load Input. A logic-low asynchronously loads data from the input registers into the PMU registers.
MAX9951/MAX9952
SPI is a trademark of Motorola, Inc.
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Dual Per-Pin Parametric Measurement Units MAX9951/MAX9952
Pin Description (continued)
PIN MAX9951 MAX9952 27 28 29 30 31 32 33 36 37 38 39 40 41 42 43 46 47 48 49 50 51 52 53 54 22 21 20 19 18 17 16 13 12 11 10 9 8 7 6 3 2 1 64 63 62 61 60 59 NAME SCLK CS INSELB HI-ZB DUTHB DUTLB EXTSELB RBX RBE RBD RBC RBB RBA RBAS CCOMB CCB FORCEB SENSEB THMAXB THMINB CLHIB CLLOB IN0B IN1B FUNCTION Serial-Clock Input. SCLK accepts external clock frequencies up to 20MHz. Chip-Select Input. Force CS low to enable the serial interface. Input Select PMU-B. INSELB is a logic input that selects between IN0B and IN1B. Force INSELB low to select IN0B. INSELB is NANDed with control register bit INMODEB. MSRB Tri-State Control Input. A logic-low places MSRB in a high-impedance state. PMU-B Window Comparator Higher Comparator Output. A high output indicates that the sensed voltage at the window comparator is below VTHMAXB. DUTHB is an open-drain output. PMU-B Window Comparator Lower Comparator Output. A high output indicates that the sensed voltage at the window comparator is above VTHMINB. DUTLB is an open-drain output. PMU-B External Current-Range Selector. Selects the external current range for PMU-B. PMU-B Current-Range Sense-Resistor Connection. Connects to the external current-range sense resistor for PMU-B. PMU-B Range E Setting Resistor Connection PMU-B Range D Setting Resistor Connection PMU-B Range C Setting Resistor Connection PMU-B Range B Setting Resistor Connection PMU-B Range A Setting Resistor Connection PMU-B Range A Setting Resistor-Sense Connection Common Connection of CMB and CXB for PMU-B PMU-B Compensation Capacitor Connection. Provides compensation for the PMU-B main amplifier. Connect a 120pF capacitor from CCB to CCOMB. PMU-B Driver Output. Forces a current or voltage to the DUT for PMU-B. PMU-B Sense Input. A Kelvin connection to the DUT. Provides the feedback signal in FVMI mode and the measured signal in FIMV mode for PMU-B. PMU-B Window Comparator Upper Threshold Voltage Input. Sets the upper voltage threshold for the PMU-B window comparator. PMU-B Window Comparator Lower Threshold Voltage Input. Sets the lower voltage threshold for the PMU-B window comparator. PMU-B Upper-Clamp Voltage Input. Sets the upper-clamp voltage level. PMU-B Lower-Clamp Voltage Input. Sets the lower-clamp voltage level. Force-Threshold Current Input for PMU-B. Sets the forced voltage in FV mode or the forced current in FI mode. Force-Threshold Voltage Input for PMU-B. Sets the forced voltage in FV mode or the forced current in FI mode
10
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Dual Per-Pin Parametric Measurement Units
Pin Description (continued)
PIN MAX9951 MAX9952 55 56 57 58 57 56 NAME FUNCTION PMU-B Measurement Output. Provides a voltage equal to the SENSE voltage in FIMV mode, and provides a voltage proportional to the DUT current in FVMI mode for PMU-B. Force HI-ZB low to place MSRB in a high-impedance state. Analog Ground Offset-Voltage Input. Sets an offset voltage for the internal current-sense amplifiers of both channels. PMU-A Measurement Output. Provides a voltage equal to the SENSE voltage in FIMV mode, and provides a voltage proportional to the DUT current in FVMI mode for PMU-A. Force HI-ZA low to place MSRA in a high-impedance state. Force-Threshold Voltage Input for PMU-A. Sets the forced voltage in FV mode or the forced current in FI mode. Force-Threshold Current Input for PMU-A. Sets the forced voltage in FV mode or the forced current in FI mode. PMU-A Lower-Clamp Voltage Input. Sets the lower-clamp voltage level. PMU-A Upper-Clamp Voltage Input. Sets the upper-clamp voltage level. PMU-A Window Comparator Lower Threshold Voltage Input. Sets the lower voltage threshold for the PMU-A window comparator. PMU-A Window Comparator Upper Threshold Voltage Input. Sets the upper voltage threshold for the PMU-A window comparator.
MAX9951/MAX9952
MSRB AGND IOS
58
55
MSRA
59 60 61 62 63 64
54 53 52 51 50 49
IN1A IN0A CLLOA CLHIA THMINA THMAXA
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11
Dual Per-Pin Parametric Measurement Units MAX9951/MAX9952
Functional Diagram
TO EXTERNAL CURRENT BOOSTER FOR HIGHEST RANGE
RE RD RC
CX_
RB CM_ VCC IN1_ IN0_ 1 0 RANGE RESISTOR SELECT FORCE_ VEE VL CC_ CCOM_ EXTSEL_ R_X R_E R_D R_C R_B R_A RA
INSEL_ 1.5M
DGND IOS HI-ZFORCE_ INMODE_ CLENABLE_ CLLO_
RS0_
RS1_
RS2_
1 CS SCLK LOAD DIN DOUT DISABLE_ VL 1.5M HI-Z_ MSR_ HI-ZMEAS_ 10 TO OTHER PMU CHANNEL 0 SERIAL INTERFACE FMODE_ MMODE_ RFS*
CLHI_
1 0 SENSE_ THMAX_
DUTH_
MAX9951 MAX9952
DUTL_ THMIN_
AGND
DGND
*RFS INTERNAL TO MAX9951D/MAX9952D ONLY
12
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Dual Per-Pin Parametric Measurement Units
Detailed Description
The MAX9951/MAX9952 force or measure voltages in the -2V to +7V through -7V to +13V ranges, dependent upon the supply voltage range (VCC and VEE). These devices also force or measure currents up to 64mA, with a lowest full-scale range of 2A. Use an external buffer amplifier for current ranges greater than 64mA. MSR_ presents a voltage proportional to the measured voltage or current. Place MSR_ in a low-leakage, highimpedance state by forcing HI-Z_ low. Integrated comparators with externally programmable voltage thresholds provide "too low" (DUTL_) and "too high" (DUTH_) voltage-monitoring outputs. Each comparator output features a selectable high-impedance state. The devices feature separate FORCE_ and SENSE_ connections and are fully protected against short circuits. The FORCE_ output has two voltage clamps, negative (CLLO_) and positive (CLHI_), to limit the voltage to externally provided levels. Two control-voltage inputs, selected independently of the PMU mode, allow for greater flexibility.
Serial Interface
The MAX9951/MAX9952 use a standard 3-wire SPI/QSPITM/MICROWIRETM-compatible serial port. Once the input data register fills, the data becomes available at DOUT MSB first. This data output allows for daisy-chaining multiple devices. Figures 1, 2, and 3 show the serial interface timing diagrams.
MAX9951/MAX9952
Serial Port Operation
The serial interface has two ranks (Figure 4). Each PMU has an input register that loads from the serial port shift register. Each PMU also has a PMU register that loads from the input register. Data does not affect the PMU until it reaches the PMU register. This register configuration permits loading of the PMU data into the input register at one time and then latching the input register data into the PMU register later, at which time the PMU function changes accordingly. The register configuration also provides the ability to change the state of the PMU asynchronously, with respect to the loading of that PMU's data into the serial port. Thus, the PMU easily updates simultaneously with other PMUs or other devices.
CS INPUT REGISTER(S) UPDATED
SCLK
DIN
;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;;
D0
D1
D2
D3
D4
D5
D6
D7
D8
D9
D10
D11
D12
D13
D14
;;;;; D15 ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;;
;;;;; ;;;;; ;;;;;
DOUT
Q0 FIRST BIT FROM PREVIOUS WRITE
Q1
Q2
Q3
Q4
Q5
Q6
Q7
Q8
Q9
Q10
Q11
Q12
Q13
Q14
Q15
LAST BIT FROM PREVIOUS WRITE
LOAD
PMU REGISTERS UPDATED
Figure 1. Serial Port Timing with Asynchronous Load QSPI is a trademark of Motorola, Inc. MICROWIRE is a trademark of National Semiconductor Corp. ______________________________________________________________________________________ 13
Dual Per-Pin Parametric Measurement Units MAX9951/MAX9952
CS INPUT AND PMU REGISTER(S) UPDATED
SCLK
DIN
;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;;
D0
D1
D2
D3
D4
D5
D6
D7
D8
D9
D10
D11
D12
D13
D14
D15
;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;;
DOUT
Q0 FIRST BIT FROM PREVIOUS WRITE
Q1
Q2
Q3
Q4
Q5
Q6
Q7
Q8
Q9
Q10
Q11
Q12
Q13
Q14
Q15
LAST BIT FROM PREVIOUS WRITE
LOAD LOAD = 0
Figure 2. Serial Port Timing with Synchronous Load
tCH SCLK
tCSSO tCSHO
tCL tCSH1
tCSS1
CS tDH tCSWH
tDS
DIN
D0
D1
D2
D3
D4
D5
D14
D15
DOUT
D0last
D1last
D2last
D3last
D4last tDO
D5last
D14last
D15last
tLDW LOAD
Figure 3. Detailed Serial Port Timing Diagram 14 ______________________________________________________________________________________
Dual Per-Pin Parametric Measurement Units
Table 1. Bit Order
BIT
CS SCLK DIN 4
MAX9951/MAX9952
BIT NAME INMODE FMODE MMODE RS2 RS1 RS0 CLENABLE HI-ZFORCE HI-ZMSR DISABLE B2 B1 A2 A1 C2 C1
15 (MSB)
SHIFT REGISTER /16 12 DOUT
14 13 12 11
CONTROL DECODE
INPUT REGISTER A
INPUT REGISTER B 12 PMU REGISTER B
10 9 8 7 6 5 4 3 2 1 0 (LSB)
12 PMU REGISTER A
LOAD
12 TO PMUA
12 TO PMUB
Figure 4. Dual PMU Serial Port Block Diagram
Use LOAD to asynchronously load all input registers into the PMU registers. If LOAD remains low when data latches into an input register, the data also transfers to the PMU register.
Table 2. Address Bit
(BIT 3) A2 0 0 1 1 (BIT 2) A1 0 1 0 1 OPERATION Do not update any input register (NOP). Only update input register A. Only update input register B. Update both input registers with the same data.
Bit Order
The MAX9951/MAX9952 use the bit order, MSB first in and first out, as shown in Table 1.
PMU Control
Programming both PMUs with the same data requires a 16-bit word. Programming each PMU with separate data requires two 16-bit words. The address bits specify which input registers the shiftregister loads. Table 2 describes the function of the address bits. Bits C1 and C2 specify how the data loads into the second rank PMU registers. These 2 control bits serve a similar function as the LOAD input. The specified actions occur when CS goes high, whereas the LOAD input loads the PMU register at anytime. When either C1 or C2 is low, the corresponding PMU register is transparent. Table 3 describes the function of the 2 control bits. The NOP operation requires A1 = A2 = C1 = C2 = 0. In this case, the data transfers through the shift register without changing the state of the device.
Table 3. Control Bit
(BIT 1) C2 0 0 1 1 (BIT 0) C1 0 1 0 1 OPERATION Data stays in input register. Transfer PMU-A input register to PMU register. Transfer PMU-B input register to PMU register. Transfer both input registers to the PMU registers.
______________________________________________________________________________________
15
Dual Per-Pin Parametric Measurement Units MAX9951/MAX9952
C1 = C2 = 0 allows for data transfer from the shift register to the input register without transferring data to the PMU register (unless LOAD is low). This permits the latching of data into the PMU register at a later time by LOAD or subsequent command. Table 4 summarizes the possible control and address bit combinations. When asynchronously latching only one PMU's data, the input register of the other PMU maintains the same data. Therefore, loading both PMU registers would update the one PMU with new data while the other PMU remains in its current state.
Mode Selection
Four bits from the control word select between the various force-measure modes of operation. INMODE selects between the two input analog control voltages. FMODE selects whether the PMU forces a voltage or a current. MMODE selects whether the DUT current or DUT voltage is directed to MSR_. HI-ZFORCE places the driver amplifier in a high-output-impedance state. Table 5 describes the various force and measure modes of operation.
Table 4. PMU Operation Using Control and Address Bits
BIT (3:2) A2 0 0 0 0 0 0 0 0 1 1 1 1 1 1 1 1 A1 0 0 0 0 1 1 1 1 0 0 0 0 1 1 1 1 BIT (1:0) C2 0 0 1 1 0 0 1 1 0 0 1 1 0 0 1 1 C1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 NOP. Transfer PMU register A from input register A. Transfer input register A from shift register. Transfer input register A and PMU register A from shift register. Transfer input register A from shift register. Transfer input register A and PMU register A from shift register. NOP. Transfer PMU register A from input register A. NOP. Transfer PMU register A from input register A. Transfer input register A from shift register. Transfer input register A and PMU register A from shift register. Transfer input register A from shift register. Transfer input register A and PMU register A from shift register. PMU-A OPERATION PMU-B OPERATION
NOP: data just passes through Transfer PMU register A from input register A. NOP. Transfer PMU register B from input register B. Transfer PMU register B from input register B. NOP. NOP. Transfer PMU register B from input register B. Transfer PMU register B from input register B. Transfer input register B from shift register. Transfer input register B from shift register. Transfer input register B and PMU register B from shift register. Transfer input register B and PMU register B from shift register. Transfer input register B from shift register. Transfer input register B from shift register. Transfer input register B and PMU register B from shift register. Transfer input register B and PMU register B from shift register.
16
______________________________________________________________________________________
Dual Per-Pin Parametric Measurement Units
Table 5. PMU Force-Measure Mode Selection
(BIT 15) IN MODE* 0 1 0 1 0 1 0 1 X X 0 1 0 1 (BIT 14) F MODE 0 0 0 0 1 1 1 1 0 0 1 1 1 1 (BIT 13) M MODE 1 1 0 0 1 1 0 0 1 0 0 0 1 1 (BIT 8) HI-ZFORCE 1 1 1 1 1 1 1 1 0 0 0 0 0 0 PMU MODE FVMI FVMI FVMV FVMV FIMI FIMI FIMV FIMV FNMI (range E only) FNMV Termination Termination Termination Termination FORCE OUTPUT Voltage Voltage Voltage Voltage Current Current Current Current HighImpedance HighImpedance Voltage Voltage Voltage Voltage MEASURE OUTPUT IDUT IDUT VDUT VDUT IDUT IDUT VDUT VDUT IDUT VDUT VDUT VDUT IDUT IDUT ACTIVE INPUT VIN0 VIN1 VIN0 VIN1 VIN0 VIN1 VIN0 VIN1 X X VIN0 VIN1 VIN0 VIN1
MAX9951/MAX9952
*INSEL = 0
Table 6. Current-Range Selection
(BIT 12) (BIT 11) (BIT 10) RS2 RS1 RS0 0 0 0 1 1 1 0 1 1 0 X 1 X 0 1 0 1 0 RANGE 2A 20A 200A 2mA 64mA External NOMINAL RESISTOR VALUE () R_E = 500k R_D = 50k R_C = 5k R_B = 500 R_A = 15.6 --
Current-Range Selection
Three bits from the control word, RS0, RS1, and RS2, control the full-scale current range for either FI (force current) or MI (measure current). Table 6 describes the full-scale current-range control.
Clamp Enable
The CLENABLE bit enables the force-output-voltage clamps when high and disables the clamps when low. There is hysteresis equal to approximately 5% of the current range for clamp.
Measure Output High-Impedance Control
MSR_ attains a low-leakage, high-impedance state by using the HI-ZMSR control bit, or the HI-Z_ input. HI-Z_ is internally pulled up to VL with a 1.5M resistor. The 2 bits are logically ANDed together to control the MSR_ output. HI-Z_ allows external multiplexing among several PMU MSR_ outputs without using the serial interface. Table 7 explains the various output modes for the MSR_ output.
Table 7. MSR_ Output Truth Table
(BIT 7) HI-ZMSR 1 0 1 0 HI-Z_ 1 1 0 0 MSR_ Measure output enabled High-Impedance High-Impedance High-Impedance
Digital Output (DOUT)
The digital output follows the last output of the serialshift register and clocks out on the falling edge of SCLK. DOUT serially shifts the first bit of the incoming serial data word 16.5 clock cycles later. This allows for daisy-chaining additional devices using DOUT and the same clock.
17
______________________________________________________________________________________
Dual Per-Pin Parametric Measurement Units MAX9951/MAX9952
"Quick Load" Using Chip Select
If CS goes low and then returns high without any clock activity, the data from the input registers latch into the PMU registers. This extra function is not standard for SPI/QSPI/MICROWIRE interfaces. The quick load mimics the function of LOAD without forcing LOAD low. and convert the sensed DUT current to the MSR_ output voltage (MI). When IOS equals zero relative to DUTGND (the GND voltage at the DUT, which the levelsetting DACs and the ADC are presumed to use as a ground reference), the nominal voltage range that corresponds to full-scale current is -4V to +4V. Any voltage applied to IOS adds directly to this control input/measure output voltage range, i.e., applying +4V to IOS forces the voltage range that corresponds to full-scale current from 0 to +8V. The following equations determine the minimum and maximum currents for each current range corresponding to the input voltage or measure voltage: VMAXCURRENT = VIOS + 4V VMINCURRENT = VIOS - 4V Choose IOS so the limits of MSR_ do not go closer than 2.8V to either VEE or VCC. For example, with supplies of +10V and -5V, limit the MSR_ output to -2.2V and +7.2V. Therefore, set IOS between +1.8V and +3.2V. MSR_ could clip if IOS is not within this range. Use these general equations for the limits on IOS: Minimum VIOS = VEE + 6.8V Maximum VIOS = VCC - 6.8V
Comparators
Two comparators configured as a window comparator monitor MSR_. THMAX_ and THMIN_ set the high and low thresholds that determine the window. Both outputs are open drain and share a single disable control that places the outputs in a high-impedance, low-leakage state. Table 8 describes the comparator output states of the MAX9951/MAX9952.
Applications Information
In force-voltage (FV) mode, the voltage at FORCE_ is directly proportional to the input control voltage. In force-current (FI) mode, the current flowing out of FORCE_ is proportional to the input control voltage. Positive current flows out of the PMU. In force-nothing (FN) mode, FORCE_ is high impedance. In measure-current (MI) mode, the voltage at MSR_ is directly proportional to the current exiting FORCE_. Positive current flows out of the PMU. In measure-voltage (MV) mode, the voltage at MSR_ is directly proportional to the voltage at SENSE_.
Current Booster for Highest Current Range
An external buffer amplifier can be used to provide a current range greater than the MAX9951/MAX9952 maximum 64mA output current (Figure 5). This function operates as follows:
Current-Sense-Amplifier Offset-Voltage Input
IOS is a buffered input to the current-sense amplifiers. The current-sense amplifiers convert the input control voltage (IN0_ or IN1_) to the forced DUT current (FI),
REXT RA
Table 8. Comparator Truth Table
(BIT 6) DISABLE 0 1 1 1 1 CONDITION X VMSR > VTHMAX and VTHMIN VTHMAX > VMSR > VTHMIN VTHMAX and VTHMIN > VMSR VTHMIN > VMSR > VTHMAX* DUTH High-Z 0 1 1 0 DUTL High-Z 1 1 0 0
MAX9951 MAX9952
MAIN AMP VIN_ 50 CCOM_ EXTSEL_ R_X R_A R_E
RE
FORCE_
DUT
*VTHMAX > VTHMIN constitutes normal operation. This condition, however, has VTHMIN > VTHMAX and does not cause any problems with the operation of the comparators.
MSR_
CURRENT- x 4 SENSE AMP SENSE_ PMU
Figure 5. External Current Boost 18 ______________________________________________________________________________________
Dual Per-Pin Parametric Measurement Units
A digital output decoded from the range select bits, EXTSEL_, indicates when to activate the booster. CCOM_ serves as an input to an external buffer through an internal 50 current-limit series resistor. Connect the external buffer output to the external current-sense resistor, REXT, and to R_X. Connect the other side of R_X to FORCE_. Ensure that the external switch is low leakage. Independent control of these switches and the HIZFORCE state permits flexible modes of operation beyond the traditional force-voltage/measure-current (FVMI) and force-current/measure-voltage (FIMV) modes. The MAX9951/MAX9952 support the following eight modes: * FVMI * FIMV * FVMV * FIMI * FNMV * FNMI (range E only) * Terminate/Measure V * Terminate/Measure I Figure 6 shows the internal path structure for force-voltage/measure-current mode. In force-voltage/measurecurrent mode, the current across the appropriate external sense resistor (R_A to R_E) provides a voltage at MSR_. SENSE_ samples the voltage at the DUT and feeds the buffered result back to the negative input of the voltage amplifier. The voltage at MSR_ is proportional to the FORCE_ current in accordance with the following formula: VMSR_ = IFORCE_ x RSENSE x 4 Figure 7 shows the internal path structure for the forcecurrent/measure-voltage mode. In force-current/measure-voltage mode, the appropriate external sense resistor (R_A to R_E) provides a feedback voltage to
MAX9951/MAX9952
Voltage Clamps
The voltage clamps limit FORCE_ and operate over the entire specified current range. Set the clamp voltages externally at CLHI_ and CLLO_. The voltage at FORCE_ triggers the clamps independent of the voltage at SENSE_. When enabled, the clamps function in FI mode only. Use clamp voltages of 0.7V above and below the FORCE_ voltage range to ensure proper operation of the PMU.
Current Limit
The FORCE_ current-limiting circuitry, 92mA (maximum), ensures a well-behaved MSR_ output for currents between the full current range and the current limits. For currents greater than the full-scale current, the MSR_ voltage is greater than +4V, and for currents less than the full-scale current, the MSR_ voltage is less than -4V. Additionally, serial interface bit B2 enables a range-sensitive current limit of 2.5 times the nominal current range. Table 9 shows the current-limit operation.
Independent Control of the Feedback Switch and the Measure Switch
Two single-pole-double-throw (SPDT) switches determine the mode of operation of the PMU. One switch determines whether the sensed DUT current or DUT voltage feeds back to the input, and thus determines whether the MAX9951/MAX9952 force current or voltage. The other switch determines whether MSR_ senses the DUT current or DUT voltage.
IN1_
RSENSE
FORCE_
DUT
Table 9. Current Limit
FMODE X 0 0 0 0 0 RANGE Any A B C D E B2 (BIT 5) 0 1 1 1 1 1 CURRENT LIMIT 65mA to 92mA 65mA to 92mA 5mA 500A 50A 5A
AV = +4
SENSE_ DUTGND
MSR_
Figure 6. Force-Voltage/Measure-Current Functional Diagram
______________________________________________________________________________________
19
Dual Per-Pin Parametric Measurement Units MAX9951/MAX9952
VDUT_
IN1_ RSENSE FORCE_
VCC - 2.5V VCC - 5V
DUT AV = +4 SENSE_ DUTGND
IDUT_
VEE + 5V
MSR_
VEE + 2.5V IMIN IMAX
Figure 7. Force-Current/Measure-Voltage Functional Diagram
Figure 8. PMU Force-Output Capability
the inverting input of the voltage amplifier. SENSE_ samples the voltage at the DUT and provides a buffered result at MSR_.
Mode and Range Change Transients
The MAX9951/MAX9952 feature make-before-break switching to minimize glitches. The integrated voltage clamps also reduce glitching at the output.
High-Impedance States
The FORCE_, MSR_, and comparator outputs feature individual high-impedance control that places them into a high-impedance, low-leakage state. The high-impedance state allows busing of MSR_ and comparator outputs with other PMU measure and comparator outputs. The FORCE_ output high-impedance state allows for additional modes of operation as described in Table 5 and can eliminate the need for a series relay in some applications. The FORCE_, MSR_, and comparator outputs power up in the high-impedance state.
DUT Voltage Swing vs. DUT Current and Power-Supply Voltages
Several factors limit the actual DUT voltage that the PMU delivers: * The overhead required by the device amplifiers and other integrated circuitry; this is typically 2.5V from each rail independent of load. * The voltage drop across the current-range select resistor and internal circuitry in series with the sense resistor. At full current, the combined voltage drop is typically 2.5V. * Variations in the power supplies. * Variation of DUT ground vs. PMU ground. Neglecting the effects of the third and fourth items, Figure 8 demonstrates the force-output capabilities of the PMU. For zero DUT current, the DUT voltage swings from (VEE + 2.5V) to (VCC - 2.5V). For larger positive DUT currents, the positive swing drops off linearly until it reaches (VCC - 5V) at full current. Similarly, for larger negative DUT currents, the negative voltage swing drops off linearly until it reaches (VEE + 5V) at full current.
Input Source Selection
Either one of two input signals, IN0_ or IN1_, can control both the forced voltage and the forced current. In this case, the two input signals represent alternate forcing values that can be selected either with the serial interface or INSEL_. Alternatively, each input signal can be dedicated to control a single forcing function (i.e., voltage or current).
Short-Circuit Protection
FORCE_ and SENSE_ input can withstand a short to any voltage between the supply rails.
20
______________________________________________________________________________________
Dual Per-Pin Parametric Measurement Units
Ground, DUT Ground, and IOS
The MAX9951/MAX9952 utilize two local grounds, AGND (analog ground) and DGND (digital ground). Connect AGND and DGND together on the PC board. In a typical ATE system, the PMU force voltage is relative to DUT ground. In this case, reference the input voltages IN0_ and IN1_ to DUT ground. Similarly, reference IOS to DUT ground. If it is not desired to offset the current control and measure voltages, connect IOS to DUT ground potential. Reference the MSR_ output to DUT ground. The combination of the capacitance across the sense resistors, along with the main amplifier compensation comparator, CM_, ensures stability into the maximum expected load capacitance while optimizing settling time for a given load.
MAX9951/MAX9952
Digital Inputs (SCLK, DIN, CS, and LOAD)
The digital inputs incorporate hysteresis to mitigate issues with noise, as well as provide for compatibility with opto-isolators that can have slow edges.
Temperature Monitor
Each device supplies a single temperature output signal, TEMP, that asserts a nominal output voltage of 2.98V at a die temperature of +25C (298K). The output voltage increases proportionately with temperature at a rate of 10mV/C. The temperature sensor output impedance is 15k (typ). Determine the die temperature using: TDIE = (100) x VTEMP - 273 [C]
Settling Times and Compensation Capacitors
The data in the Electrical Characteristics table reflects the circuit shown in the Functional Diagram that includes a single compensation capacitor (CX_) effectively across all the sense resistors. Placing individual capacitors, CRA, CRB, CRC, CRD, and CRE directly across the sense resistors, R_A, R_B, R_C, R_D, and R_E, independently optimizes each range.
Chip Information
TRANSISTOR COUNT: 11,000 PROCESS: BiCMOS
______________________________________________________________________________________
21
Dual Per-Pin Parametric Measurement Units MAX9951/MAX9952
Pin Configurations
THMAXA
64
63
62
61
60
59
58
57
56
55
54
53
52
51
50
49
THMAXB
48 SENSEB 47 FORCEB 46 CCB 45 VCC 44 VEE 43 CCOMB 42 RBAS 41 RBA 40 RBB 39 RBC 38 RBD 37 RBE 36 RBX 35 VCC 34 VEE 33 EXTSELB 32
THMINA
SENSEA FORCEA CCA VCC VEE CCOMA RAAS RAA RAB
1 2 3 4 5 6 7 8 9
MAX9951
RAC 10 RAD 11 RAE 12 RAX 13 VCC 14 VEE 15 EXTSELA 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31
DUTLA
TEMP
HI-ZA
THMINB DUTHB
TOP VIEW
CLLOA
CLLOB
CLHIA
CLHIB
MSRA
MSRB
AGND
IN0A
IN1A
IN1B
IN0B
IOS
DUTHA
INSELA
INSELB
TQFP-EPR
22
______________________________________________________________________________________
DUTLB
DGND
LOAD
CS
DOUT
HI-ZB
DIN
SCLK
VL
Dual Per-Pin Parametric Measurement Units
Pin Configurations (continued)
MAX9951/MAX9952
THMAXB
64
63
62
61
60
59
58
57
56
55
54
53
52
51
50
49
THMAXA
48 SENSEA 47 FORCEA 46 CCA 45 VCC 44 VEE 43 CCOMA 42 RAAS 41 RAA 40 RAB 39 RAC 38 RAD 37 RAE 36 RAX 35 VCC 34 VEE 33 EXTSELA 32
THMINB
SENSEB FORCEB CCB VCC VEE CCOMB RBAS RBA RBB
1 2 3 4 5 6 7 8 9
MAX9952
RBC 10 RBD 11 RBE 12 RBX 13 VCC 14 VEE 15 EXTSELB 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31
DUTLB
TEMP
HI-ZB
THMINA DUTHA
CLLOB
CLLOA
TOP VIEW
CLHIB
CLHIA
MSRB
MSRA
AGND
IN0B
IN1B
IN1A
IN0A
IOS
DUTHB
INSELB
INSELA
TQFP-EP
Package Information
For the latest package outline information, go to www.maxim-ic.com/packages.
Maxim cannot assume responsibility for use of any circuitry other than circuitry entirely embodied in a Maxim product. No circuit patent licenses are implied. Maxim reserves the right to change the circuitry and specifications without notice at any time.
Maxim Integrated Products, 120 San Gabriel Drive, Sunnyvale, CA 94086 408-737-7600 ____________________ 23 (c) 2005 Maxim Integrated Products Printed USA is a registered trademark of Maxim Integrated Products, Inc.
DUTLA
CS
SCLK
DOUT
DGND
LOAD
HI-ZA
DIN
VL

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